IIS 6.0 and ASP.NET - Could not write to output file ... The directory name is invalid

I'm running IIS 6.0 on Windows 2003 and started getting this error:

Compiler Error Message: CS0016: Could not write to output file 'c:\WINDOWS\Microsoft.NET\Framework64\v2.0.50727\Temporary ASP.NET Files\root\7382c13f\ea9b3ff7\App_global.asax.zodyof_q.dll' -- 'The directory name is invalid. '

I've checked all the permissions, and everything is as it needs to be - plus, the error message doesn't mention permissions. I've tried the following already:

• Following the instructions from this [outdated] KB article: http://support.microsoft.com/kb/825791/en-us
• Repairing the .NET Framework v3.5 installation, then rebooting
• Deleting the contents of c:\WINDOWS\Microsoft.NET\Framework64\v2.0.50727\Temporary ASP.NET Files\root, then running iisreset
• Resetting the permissions on c:\WINDOWS\Microsoft.NET\Framework64\v2.0.50727\Temporary ASP.NET Files\root, then running iisreset
• Resetting the permissions on c:\WINDOWS\TEMP, then running iisreset.

Any suggestions?

Other notes/responses:

• The Indexing service is disabled.

I've found an answer that is applicable if you've installed ANTS profiler and it crashed while profiling. This KB Article describes one of the solutions:

http://www.red-gate.com/supportcenter/Content.aspx?p=ANTS%20Profiler&c=knowledgebase\ANTS_Profiler\KB200903000362.htm